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pld 4000 system  (PVD Products Inc)


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    PVD Products Inc pld 4000 system
    Pld 4000 System, supplied by PVD Products Inc, used in various techniques. Bioz Stars score: 94/100, based on 2 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/pld-4000/PLD-4000/pmc12515231__10854_2025_15921_MOESM1_ESM-52-5-3
    Average 94 stars, based on 2 article reviews
    pld 4000 system - by Bioz Stars, 2026-09
    94/100 stars

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    other:

    Article Title: MEMS-actuated terahertz metamaterials driven by phase-transition materials
    Article Snippet: d on 650 μm thick double-side polished sapphire substrates using plasma-enhanced chemical vapor deposition (PECVD, Plasma-Therm Versaline). After that, VO2 was deposited using pulsed laser deposition (PVD products PLD-4000) with good uniformity of polycrystalline phase. The deposition temperature was 600 °C, and the O2 concentration was set to 10 mTorr. After the deposition of about 120 nm thick VO



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